Nanoelectromechanical resonators based on hafnia–zirconia–alumina superlattices with gigahertz spectrum coverage NatureElectron
We would like to thank the University of Florida Nanoscale Research Facility cleanroom staff for fabrication support and T. Hancock for supporting this project and helpful technical discussions. T.T., F.H. and R.T.
acknowledge financial support from the Defense Advanced Research Projects Agency through the Young Faculty Award and National Science Foundation through the CAREER award . E.H. and H.K. acknowledge financial support from the University of Florida through the Research Opportunity Seed Fund .
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