New way to make telescope mirrors could sharpen our view of the universe opticalsociety OpticalSociety
From the above analysis, we find that for silicon wafers with single-side oxide, the side with the oxide and under compression is much stronger than the other side with bare silicon, and is unlikely to initiate a fracture . Also, the decrease in strength due to laser micromachining is small, because micromachining is applied on the surface with the oxide, yet fracture still first initiates from the bare silicon side.
In addition, this research shows that even when not using micromachining as a stress compensation method, oxidizing the mirror to introduce a compressive thermal oxide on the surface can greatly improve the equibiaxial strength and reduce the chance of breaking. This can be applied to any Si structures flying into the sky in the future or other ceramic-type space structures, not limited to just optics or imaging devices.
]. Additionally, we performed a series of tests to evaluate the strength of the thin mirrors after being treated with ultrafast laser micromachining. For silicon mirrors with single-side thermal oxide, the decrease in strength of mirror materials due to laser micromachining is small. For silicon mirrors with double-side thermal oxide, the introduction of micromachined features decreased the strength , while the resultant strengths are still higher than bare Si wafers without micromachining.
In short, the femtosecond laser micromachining technique provides a fast, simple, and straightforward way to correct mirror figure errors by writing patterns on the back surface of the mirror substrates with ultrafast lasers. Our experiments and tests show that it can be a possible candidate for trimming stress for thin space optics in the stress compensation step, and it does not greatly compromise strength if applied properly.The authors thank Dr. Brandon Chalifoux and Dr.
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